Workshop on temperature measurement of semiconductor wafers using thermocouples

Workshop on temperature measurement of semiconductor wafers using thermocouples

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Presentation materials from the satellite workshop held at NIST, September 19, 2000 in collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors-- RTP'2000 outlining how to use thermocouples for measurements of temperature in semiconductor processing and how to achieve the highest accuracy.

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