Advanced Semiconductor-on-Insulator Technology and Related Physics 15

Advanced Semiconductor-on-Insulator Technology and Related Physics 15

by Y. Omura

333 pages· 2011· ISBN 9781566778664
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About
This is the continuation of the long running ¿Silicon-on-Insulator Technology and Devices¿ symposium. The issue of ECS Transactions covers recent significant advances in SOI technologies, SOI-based nanoelectronics and innovative applications including scientific interests. It will be of interest to materials and device scientists, as well as to process and applications oriented engineers and scientists.

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