Advanced RF MEMS

Advanced RF MEMS

by S. Lucyszyn

Part of The Cambridge RF and microwave engineering series

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"An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. Reviews RF MEMS technologies -- Illustrates new techniques that solve long-standing problems associated with reliability and packaging --Provides the information needed to incorporate RF MEMS into commercial products -- Describes current and future trends in RF MEMS, providing perspective on industry growth -- Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation"-- "Advanced RF MEMS is an up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. This book Reviews RF MEMS technologies; Illustrates new techniques that solve long-standing problems associated with reliability and packaging; provides the information needed to incorporate RF MEMS into commercial products; describes current and future trends in RF MEMS, providing perspective on industry growth; and is ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation"--

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