Fabrication of micrometer line width SAW filters using direct optical projection

Fabrication of micrometer line width SAW filters using direct optical projection

by W. J. Kearns

Book 225 of Instrumentation papers --

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Projection printing directly on acoustic substrates using a 10X master and a high resolution 10:1 reduction lens in conjunction with the photoresist stripping technique has resulted in successful fabrication of micrometer line-width SAW filters, which are used in command, control, and communications and electronic sensing applications. This system and a typical 320 MHz (1.26 micrometer line width) SAW filter are described in detail.

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