Soft X-Rays and Extreme Ultraviolet Radiation

Soft X-Rays and Extreme Ultraviolet Radiation

Principles and Applications

by David Attwood

470 pages· 2007· ISBN 9780521029971
About
This comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the...

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