The Physics of Submicron Lithography

The Physics of Submicron Lithography

by Kamil A. Valiev

Part of Microdevices, Physics and Fabrication Technologies

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About
This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.

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