Interferometric metrology of photomask blanks

Interferometric metrology of photomask blanks

by C. J. Evans

Book 6701 of NISTIR --

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"The purpose of this report is to describe interferometric measurements of photomask blanks that could be made at the National Institute of Standards and Technology (NIST) using existing equipment without the use of coatings which must subsequently be removed"--P. 2

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