Jung-Chih Chiao
Device and process technologies for MEMS and microelectronics II
Device and Process Technologies for Mems ,Microelectronics, and Photonics
Device and process technologies for microelectronics, MEMS, and photonics IV
Micro- And Nanotechnology
Micromachining and Microfabrication Process Technology XI
Smart sensors, actuators, and MEMS
MEMS/MOEMS technologies and applications III
MEMS/MOEMS technologies and applications III
Micro- and nanotechnology
Micro- and nanotechnology
Micro- and nanotechnology
Micromachining and microfabrication process technology XIV