Alfred Grill

• Cold Plasma Materials Fabrication
• Cold plasma in materials fabrication
• Materials, Processes and Reliability for Advanced Interconnects for Micro- And Nanoelectronics - 2009
• Nitriding of titanium and titanium-8-percent-aluminum-1-percent-molybdenum-1-percent-vanadium alloy with an ion-beam source
• RF sputtered silicon and hafnium nitrides as applied to 440C steel