S. P. Murarka

• Advanced interconnects and contact materials and processes for future integrated circuits
• Advanced metallizations in microelectronics
• Electronic materials
• Interface Control of Electrical, Chemical, and Mechanical Properties Vol. 318
• Low-dielectric constant materials-- synthesis and applications in microelectronics
• Metallization
• Microelectronics technology and process integration
• Silicides for VLSI applications
• Interlayer dielectrics for semiconductor technologies