Michael T. Postek
Scanning electron microscopy
Critical Issues in Scanning Electron Microscope Metrology
Integrated Circuit Metrology, Inspection, and Process Control VI
Integrated Circuit Metrology, Inspection, And Process Control VII
Microlithography and metrology in micromachining
Microlithography and metrology in micromachining II
Nanostructure science, metrology, and technology
Instrumentation, metrology, and standards for nanomanufacturing II
Instrumentation, metrology, and standards for nanomanufacturing III
Instrumentation, metrology, and standards for nanomanufacturing III
Instrumentation, metrology, and standards for nanomanufacturing IV
Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors V